durusmail: mems-talk: Silicon on fused silica or SOS?
Silicon on fused silica or SOS?
2009-09-16
2009-09-17
Silicon on fused silica or SOS?
Chong Liu
2009-09-16
Hi,

Has anybody here ever used SOS (silicon on sapphire) wafers before?  And any
recommendation about where to order? I am thinking to buy wafers where
the substrate is transparent but could stand higher temperature. The
candidates are silicon on fused silica or SOS. The former seems rare (is it?),
so I choose the latter.

Thank you very much!

Chong

--
Chong Liu
Graduate
Yang's Group
Department of Chemistry
University of California, Berkeley
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