I think "Microchip Fabrication - a practical guide to semiconductor
processing" by Peter Van Zant, is a very good such book.

-----Original Message-----
From: mikas remeika [mailto:remeika@physics.ucsd.edu]
Sent: Wednesday, September 16, 2009 3:14 PM
To: General MEMS discussion
Subject: [mems-talk] Introductory MEMS books

This actually brings up an interesting point,

Most of the people I know have learned everything they know about
semiconductor processing from colleagues and by reading spec-sheets.
Occasionally, however, it is interesting to read about more general
aspects of the micro/nanofabrication that don't necessarily relate to
one's own work.

So, I'm interested, what books would the readers of this forum recommend
as a general introduction to the field. Something that would not be
completely basic, i.e. contain usable technical information, but not to
the point of being a reference book, and preferably not a textbook for
undergraduates.

Looking forwards to your suggestions,
-mikas