I would recommend "Fundamentals of microfabrication" by Marc J. Madou.

- Prasanna

On Wed, Sep 16, 2009 at 8:14 AM, mikas remeika wrote:

> This actually brings up an interesting point,
>
> Most of the people I know have learned everything they know about
> semiconductor processing from colleagues and by reading spec-sheets.
> Occasionally, however, it is interesting to read about more general
> aspects of the micro/nanofabrication that don't necessarily relate to
> one's own work.
>
> So, I'm interested, what books would the readers of this forum
> recommend as a general introduction to the field. Something that would
> not be completely basic, i.e. contain usable technical information,
> but not to the point of being a reference book, and preferably not a
> textbook for undergraduates.
>
> Looking forwards to your suggestions,
> -mikas
>

--
Thanks & Regards,
Prasanna Srinivasan