durusmail: mems-talk: Sb deposition
Sb deposition
2009-09-25
2009-09-25
Sb deposition
Harsh Sundani
2009-09-25
Hi,

I am trying to deposit Sb on a Si wafer by thermal evaporation.However I am
unable to acheive a good deposition.

Could someone please share their experience about the optimum parameters to get
a fair deposition? Also is sputtering Sb a beter option than depositing it with
the thermal evaporator?

Thanks.

Harsh Sundani
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