AC or DC measurement you need? Try a Capacitance bridge first. There are existing instruments so-call AC capacitance bridge that can do this. Or you might need to build a bridge by yourself. Jie On Thu, Sep 24, 2009 at 12:11 PM, Zhang, Shengwrote: > Folks, > > I was wondering what's the usual method to measure a capacitive sensor? I > need to measure capacitance of ~2pF to ~6pF accurately in the order of 0.1pF > (or even more accurate). Probe stations usually introduce parasitic > capacitance in the order of 100pF... > > Also, how to bond the sensor to the test fixture is another issue. > Currently I use silver epoxy and thin wire to connect the sensor to a RCA > plug. That severely compromised the repeatability since I need to make the > connection everytime by hand.. > > Any suggestions? > > Thanks, > Jason * Zou Jie (Jay) * Department of Physics * University of Florida * Tel: +1-352-846-8018 * Email: zoujiepku@gmail.com * Homepage: http://plaza.ufl.edu/zoujie/