If you are not using adhesion promoter get some A-174.  That said you may have
problems with any polymer adhesion to silicon in a basic solution.  For example,
5% KOH in DI works well to strip nearly any polymer from a silicon surface.  It
is really handy for stripping negative resist.

Good luck,

   Michael

>>> Reza Rashidi  9/29/2009 10:45 PM >>>
Hi,

I have a silicon wafer with a 5 um parylene on it which is a chemical protector.
The package will operate at 170C and up to 300 psi in a basic solution. Due to
poor adhesion of parylene, the liquid penetrates under the parylene film. I am
wondering how I can increase the adhesion.

Your advise will be appreciated.

Thnaks,
Reza