Hey Andrea, Upload your picture for the cross section somewhere and give us a link. Otherwise it's super difficult to explain I guess. Jie On Sat, Oct 3, 2009 at 2:47 PM, Andrew Saranganwrote: > It is still not clear to me what you are attempting to do. Are you > trying to change the sidewall profile of the resist? If so, reflowing > is a good way to go. The spikes you refer to are also not clear to me. * Zou Jie (Jay) * Department of Physics * University of Florida * Tel: +1-352-846-8018 * Email: zoujiepku@gmail.com * Homepage: http://plaza.ufl.edu/zoujie/