Hi all, Here is two links where it is possible to download the files. http://www.megaupload.com/?d=WEYN1TYI http://rapidshare.com/files/288737497/File.rar.html In the folder file.rar there are two files one is a power point of what i am tring to do, and the other is an article where this process is well explain (in this article is mentioned a bilayer process planarization). I hope that the ppt is clear. Thaks again for the helpfulness. Regards Andrea