durusmail: mems-talk: Electroplating question
Electroplating question
2009-10-13
2009-10-13
2009-10-14
2009-10-14
Electroplating question
Pramod Gupta
2009-10-14
Hi Igor

Your Seedless Ni Electroplating tool looks very impressive. Do you have such
type of tool for Cu also? If yes, how much it cost it and where can I get it?

With regards,

Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646

--- On Tue, 10/13/09, Igor Kadija  wrote:


From: Igor Kadija 
Subject: Re: [mems-talk] Electroplating question
To: "General MEMS discussion" 
Date: Tuesday, October 13, 2009, 2:13 PM


Lin,

You should look into the works done by MESA Research Institute, University of
Twente, The Netherlands, http://www.fibrotools.com/articles-and-reviews.html,
article #5. They successfully implemented direct electroplating on highly doped
Si by a simple modification of a commecial plating tool.

Igor Kadija
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