Image reversal with flood exposure control allows -22 degrees, through
vertical to +22 degrees.  Bill Moffat

________________________________

From: mems-talk-bounces@memsnet.org on behalf of QiuWeibin
Sent: Fri 10/30/2009 2:16 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] vertical taper Photoresist profile




 Dear All,

    We are trying to get the vertical taper PR profile with 8mm size and =
0-1.5um thickness. Can anyone give us some suggestion?  We want to avoid =
a grey scale mask, since they are so costly.

Thanks a lot

Qiu