I have extensive experience with the CD-1700 from n&k technology. I am not familiar with the other tools you mention, and so can't comment on the relative merits (which approaches the sort of commercialism which is verboten on this discussion group). I am familiar with spectroscopic and conventional ellipsometry; reflectometry seems to me to be a much more powerful and robust tool, as well as having much faster throughput. --- Albert K. Henning, PhD Director of MEMS Technology NanoInk, Inc. 215 E. Hacienda Avenue Campbell, CA 95008 408-379-9069 ext 101 ahenning@nanoink.net -----Original Message----- From: Brian Stahl [mailto:bstahl@mrl.ucsb.edu] Sent: Monday, November 02, 2009 5:01 PM To: General MEMS discussion Subject: [mems-talk] Spectroscopic Reflectometer Hello Everyone, I'm in the market for a spectroscopic reflectometer tool for measuring thin film stacks, and one of the vendors I've been talking to is Angstrom Sun Technologies. I'm also looking at Filmetrics, however the system I need is considerably less expensive from Angstrom Sun Technologies. Have any of you ever worked with them or their systems, and if so would you be willing to give me your opinion of them (service, reliability, meeting expectations, etc.)? Thanks, Brian C. Stahl