Hello Natsuki,

what is the pulse duration and what is the repetition rate? Usually
Nd:YAG lasers have pulse durations of several nanoseconds. The general
rule is that a much better quality of ablation is obtained by
decreasing the pulse width. The shorter the better. Keep the fluence
near threshold, but not much above it.


cheers


mario

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Dear all,

After cutting silicon wafer with laser (frequency-tripled Nd:YAG-laser
with wave length 355nm) I observe that the silicon surface turned
quite rough around the cutting edge (height up to ~1痠, width ~ 50痠).
Do you know some trick to avoid or remove this surface roughening so
that the surface quality is good enough for silicon fusion bonding
after laser cutting?

Thank you!

Cheers

Natsuki