Ameya, Try an air-brush to spray coat resist, you might need to dilute your medium with solvent and thoroughly clean the brush after every session, but it works OK for some applications. Loren -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of ameya g Sent: Wednesday, November 11, 2009 10:58 PM To: General MEMS discussion Subject: Re: [mems-talk] Photolithography on a rough surface Thanks for the suggestions. I think spray coating seems to be a very good solution to my problem. I am from Arizona State University and I am not sure if I can find a spray coater at my university. If there is anyone on the mailing list from ASU who has a spray coater, kindly send me an email. Thanks, -Ameya - ameya.g@gmail.com