Try SU-8

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Mikael Evander
Sent: Friday, December 04, 2009 2:48 PM
To: 'General MEMS discussion'
Subject: [mems-talk] thick structurable films

Hi.

I'm currently using a laser ablated double adhesive film as a fluidics
layer between two glass chips in order to keep the fabrication
simple/efficient. Unfortunately it turns out that the film after bonding
is a bit too thick, 95 um instead of the 50 um I would prefer.

Can anyone recommend some kind of film or other technique that would
enable me to have a 50 um thick layer that is easily bonded to glass
without the use of adhesives and can be patterned either by
photolithography or laser ablation. The glass wafers have electrodes on
them that cannot be covered by any material, which rules out a lot of the
adhesives techniques.

I have been looking at photostructurable PDMS which seems to be the best
I've found so far. I don't know how well it works in reality though and if
anyone has experience of it I would love to hear more about it.

Thanks!

/Mikael