Josh,

FDTS (perfluorodecyltrichlorosilane) is pretty standard still, and easy to find.

"Fluorinated polymer" probably refers to Teflon AF (amorphous
fluoropolymer). You can spin it on, and a single 100 ml bottle costs
around $500 or so from Dupont's "Teflon Store." It works great as an
anti-adhesion layer for PDMS, but it'll never be as smooth as a nice
mono-ish layer of FDTS; your mold will be wavy on the 100's of nm to
single-digit micron scale.

- Kevin

On Thu, Dec 17, 2009 at 3:02 PM, Josh  wrote:
> Hi,
>
> I am seeking your recommendation on fluorinated polymer for replication of
> silicon structures. I haven't been involved in replication process for a
> couple years and suddenly I realize it may be a good technique for my
> current work. What I used is PDMS Sylgard 184 from Dow Corning. Before I
> used it, I coat a layer of trichlorosilane (somewhat exotic). So it will be
> easy for peeling-off.
>
> I am thinking I may be way behind the wheel of technology and would like to
> know current popular soft lithography methods. I noticed the term of
> fluorinated polymer but not sure what it is. Can anybody here help? Any
> literature or details of products are appreciated.
>
> Thanks,
> Josh