durusmail: mems-talk: SU8 2010 (microchem) problem
SU8 2010 (microchem) problem
2010-01-05
SU8 2010 (microchem) problem
Peng Xu
2010-01-05
Dear Everyone,

Need help:

1\ after soft bake, i will see some bubbles inside of SU8 film, does it have
some bad effect?

2\ Could you give me some suggestion about developing SU8?
I use BTS-220 now, after developing, my figure are not swelling, but will
adhere with each other when the distance is so small(~2um). I think maybe I
do something wrong in develop step.

Peng Xu
University of Louisville
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