Dear Everyone, Need help: 1\ after soft bake, i will see some bubbles inside of SU8 film, does it have some bad effect? 2\ Could you give me some suggestion about developing SU8? I use BTS-220 now, after developing, my figure are not swelling, but will adhere with each other when the distance is so small(~2um). I think maybe I do something wrong in develop step. Peng Xu University of Louisville