durusmail: mems-talk: silicon membrane thickness measurement
silicon membrane thickness measurement
2010-01-06
2010-01-07
2010-01-08
2010-01-08
silicon membrane thickness measurement
Andrea Mazzolari
2010-01-05
Hi All,

i need to realize silicon membranes of thickness 14 and 29 um in (100)
silicon.

I need to measure membrane thickness with a tollerance of 0.5um.

Any suggestion about a way to measure membrane thickness with a so good
resolution ?

Best regards,
Andrea

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