durusmail: mems-talk: silicon membrane thickness measurement
silicon membrane thickness measurement
2010-01-06
2010-01-07
2010-01-08
2010-01-08
silicon membrane thickness measurement
Fei Wang
2010-01-07
Hi, Andrea,

Use a microcaliper instead to measure the thickness of your wafer and
profilemeter is only used for the etching depth.

Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
Fax:  +45 4588 7762
Email: fei.wang@nanotech.dtu.dk
       http://www.nanotech.dtu.dk
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