Dong,

THis could have been due to dielectric break down. It depends on the voltage
you applied across the electrodes and the band gap of the dielectric
materials (alumina and SOG). How thick the layers are and how much voltage
you applied?

- Prasanna

On Sat, Jan 9, 2010 at 4:29 AM, Dong Cai  wrote:

> Hi,
>
> I have a 3D nanostructure made of carbon materials. Two dielectric layers
> are deposited on it. The first layer is 100 nm alumina by ALD, then the
> second one is spin-on-glass (512B). The chip was top covered by 200 nm
> silver film.  But I frequently measured a short between the top Ag and
> bottom carbon.
>
> Need help! Thanks!
>
> Dong

--
Thanks & Regards,
Prasanna Srinivasan