durusmail: mems-talk: Softwall modular cleanrooms
Softwall modular cleanrooms
2010-01-10
Softwall modular cleanrooms
Mike Whitson
2010-01-10
Hello all,

Does anyone have experience with configuring and setting up a small modular
softwall cleanroom/booth for basic spin coat and photo operation (probably not
more critical than class 100)?  There seem to be plenty of vendors, so I'm more
interested in hearing about obvious "don't forgets" during the process, as well
as tricks for issues like hookups (power/gas/vacuum/exhaust), climate control
(humidity!), and how to handle gowning and entry without devoting a huge amount
of floor space.  The vendors I've identified so far seem to work on an RFQ basis
for turnkey solutions rather than pricing out standard components, so I want to
make sure I'm comparing apples to apples when getting quotes.
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