durusmail: mems-talk: RIE recipe to etch GaAs
RIE recipe to etch GaAs
2010-01-11
RIE recipe to etch GaAs
Charleston LEE
2010-01-11
Hi all,

Does anyone know a RIE recipe to etch GaAs? How about the etch rate and
what mask should be used?

The etching depth would be 1um.

Thanks very much for your advice.

LEE
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