Hi,

I have had great luck with Cleanroom products
http://www.cleanairproducts.com/cleanrooms/modular-cleanrooms/modular-cl
eanrooms.html

They are very good. You can just order the standard size kits and you
can add in change areas. These units have HEPA filter/motor units so
they just use the air from the area that the softwall cleanroom is in.
So that makes it easier for the user to air condition a large space. So
the temp/Rh control will depend on how much $$ you have to spend to get
the air surrounding the softwall room to 68F 40%rH. If you are in a
dirty area plan on changing the pre-filters every month so make sure
that you can access them. If the pre-filters are clogged the air flow
drops down and eventually you break through and ruin the HEPA filter.

Make sure that your curtains go all the way to the floor and that they
are ESD curtains, otherwise the plastic charges up and you have big
static problems. Run the gas line and power lines to your tools along
the floor or cut holes in the curtains. You want to have almost 100%
coverage of the HEPA filters.

Regards

Rick


-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Mike Whitson
Sent: Sunday, January 10, 2010 5:04 PM
To: General MEMS discussion
Subject: [mems-talk] Softwall modular cleanrooms

Hello all,

Does anyone have experience with configuring and setting up a small
modular softwall cleanroom/booth for basic spin coat and photo operation
(probably not more critical than class 100)?  There seem to be plenty of
vendors, so I'm more interested in hearing about obvious "don't forgets"
during the process, as well as tricks for issues like hookups
(power/gas/vacuum/exhaust), climate control (humidity!), and how to
handle gowning and entry without devoting a huge amount of floor space.
The vendors I've identified so far seem to work on an RFQ basis for
turnkey solutions rather than pricing out standard components, so I want
to make sure I'm comparing apples to apples when getting quotes.