Hi All, i need to pattern S1813 with vertical sidewalls, but at the present time i get an angle of about 54 deg. Awful... My maskaligner is an old karl suss. Here is my procedure: -spinning of S1813 -soft bake 3 min at 115 deg -photolitography in contact mode (150mJ) -development in MF319 (about 45 seconds) -hard bake 15 min at 115. Any suggestion to improve the sidewall angle ? Best regards, Andrea