Hi Andrea, if i well understeand you would to obtain with S1813 an angle of about 90° is that RighT? ----- Original Message ----- From: "Andrea Mazzolari"To: "General MEMS discussion" Sent: Sunday, January 17, 2010 2:20 PM Subject: [mems-talk] S1813 vertical sidewalls > Hi All, > > i need to pattern S1813 with vertical sidewalls, but at the present time i > get an angle of about 54 deg. Awful... > My maskaligner is an old karl suss. > > Here is my procedure: > -spinning of S1813 > -soft bake 3 min at 115 deg > -photolitography in contact mode (150mJ) > -development in MF319 (about 45 seconds) > -hard bake 15 min at 115. > > Any suggestion to improve the sidewall angle ? > > Best regards, > Andrea