Hi Prasanna,
PR thickness is about 2 um.

May you give me the recipe you used to obtain vertical sidewalls in S1813
? I think it could be a good starting point for me.

Thanks.
Andrea

> Hi Andrea,
> The sidewall angle depends on many process parameters. What is the
> thickness
> of your resist?
> Earlier I experienced a similar problem which I overcame by increasing the
> resist thickness and reducing the baking temperature. This in turn
> minimises
> the resist reflow which causes angular side walls. Again it depends on the
> geometry of the pattern as well. Perhaps you may try for your pattern as
> well to see if this improves.
>
> Regards,
> Prasanna