Hello,

I would like to spin multiple layers of Fox 16 (aka HSQ) e-beam resist.
I have tried a couple of times to do this but I only end up with a
resist thickness after development of around 1.1 times that of a single
coating step.

Does anyone have any ideas?

Thanks,

Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
74 Oakfield Avenue Room 5
University of Glasgow
Glasgow
Scotland
G12 8LS

Telephone: +44(0)141 330 6690