Dear helene viatge

         I used the EDTA wet etch for titanium film. But you know that wet
etching is isotropic
and tilted sidewalls were always obtained. If you need vertical sidewalls, maybe
you can try
the ion beam etching (milling).

Yours sincerely,

Lei Wang

School of Physics
Shandong University
5, Hongjialou,
Jinan, Shandong Province 250100
P. R. China
Tel:86-531-88364655  Fax: 86-531-88565167
Email: leiwangsdu@sdu.edu.cn

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Hello everybody,
I am quite a novice on the subject, but I would like to know if it is possible
to etch a layer of titanium vertically on 300 µm and how isotropic is it? Do you
have any idea of how the etching can affect the surrounding parts?
Moreover is the bonding strength of TiO2 on Ti higher than SiO2 on Ti?
Thanks a lot for your help,
Have a good day,
Helen.