Hi Will,

XeF2 won't etch electroplated copper if your system is free of any
kind of leakage problem and your wafer is totally dry.

Fei

2010/1/25, Will Yu :
> Hello all,
>
> I would like to etch Si with XeF2 gas. But my sample contains
> electroplated copper.
>
> Does anyone know if XeF2 will etch copper or not?
>
> Thanks,
> Will

--
Best regards,
Yours sincerely
Fei Wang
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MIC - Department of Micro and Nanotechnology
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