Hi Jiho

I am not sure exactly what you are trying to do but XeF2 will etch Si with no
attack on poylmers.

Regards
David Springer
XACTIX, Inc.
davids@xactix.com


> Hey all,

Does anyone know how to control HNA Si etching when you have to
mold your device side with polymer?

HNA reacts with polymer and it is difficult to control etching Si by itself.

Please let me know if you have any suggestions?

--
Great day,
-- Jiho Song