I'm sorry but the correct balance of reaction (and the forming species) is the following: H2O2 + H2SO4 = HSO4(-) + H3O(+) + OH ......this is a redox reaction in wich the oxygen change its oxidation state..... see for more details on the reaction mechanism the following paper... http://www.springerlink.com/content/t582t7267w88k835/fulltext.pdf Bye Edmondo -------------------------------------------------- From: "DEBASHIS MAJI"Sent: Tuesday, January 26, 2010 9:23 PM To: "General MEMS discussion" Subject: [mems-talk] Piranha Reaction > Dear all, > > I shall be highly thankful if anyone can kindly tell the effect of change > in > the ratio of H2O2 and H2SO4 (normally 1:1) in Piranha solution. I know > that > this reaction takes place in the following order : H2O2 + H2SO4 = HSO4(-) > + > H3O(+) + O. It is this nascent oxygen that is used in cleaning or surface > treatment, etc. I would like to know the effect of increase in sulphuric > acid conc. say from 1:1 to 3:1 in the piranha solution. Would it result in > more vigorous reaction with more nascent O? if so how do the equations > go...? > > Kindly help me out regarding this. Thanks in advance. > > Debashis Maji