Hello Sven,

Vitaley mentioned a good source "Etching in Microsystem Technology" by Michael
Köhler.

Since this book is presumably out of print already check these books on related
topics like "Semiconductor Sensors" by S. M. Sze


http://www.amazon.com/Etching-Microsystem-Technology-
Michael-K%C3%B6hler/dp/3527295615#bort


Good luck,

Karl



-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im
Auftrag von Sven TS Holmström
Gesendet: Dienstag, 26. Januar 2010 14:34
An: General MEMS discussion
Betreff: [mems-talk] Etch Rates for Micromachining Processing

Dear all MEMS-list subscribers,

One very important piece of information while designing
micro-fabrication flows is known etch-rates of your materials in
different etchants. For several years I have made good use of  Etch
Rates for Micromachining Processing, part I and II by Williams et. al
to get a first idea of possibilities. These papers are certainly a
good source, but they are not complete and they are by now a few years
old.

Does anyone here know about a more complete compilation of etch rates,
or perhaps a smaller, but complimentary collection? I am interested in
papers as well as books or other media, if available.

best regards,

/Sven Holmström, Koc University, Istanbul, Optical Microsystems
Laboratory (http://mems.ku.edu.tr/)