Michael: Our company is involved with various wet/dry chemical etching techniques, specifically geared towards MEMS application. We have been conducting extensive R&D work in the area of selective etching, generating silicon membranes, maskless implantation technique, FIB based micromachining and FIB based Ultra high density data-storage techniques. We would be more than willing to do some work for your company on selective etching of PSG and other materials. We also have the capability and expertise to build custom low cost wet chemistry setup. I would really appreciate it if you could send me more details as to what exactly you are looking for. Thank you and am looking forward to hearing from you soon. Regards Jayant Neogi ********************************************************** Jayant Neogi Director: Research and Development Charged Particle Beam Operations NORSAM Technologies Ph# (503) 640-0586 Fax# (503) 640-8117 ************************************************************ -----Original Message----- From: Pedersen, MichaelTo: MEMS@ISI.EDU Date: Monday, October 26, 1998 9:53 AM Subject: HF Vapor phase etching > Dear colleques, > > We are currently looking for any company/university group, who have in > their possession a system for HF vapor phase etching of silicon oxide. > > We would like to have some trials run (at cost) on samples of a new > sensor structure containing a phosporus-doped silicon oxide > sacrificial layer. > > If anyone is interested, or has any advice on where to locate such a > system please feel free to contact me. > > > Michael Pedersen, Ph.D. > Research Engineer > > Knowles Electronics Inc. > 2800 West Golf Road > Rolling Meadows, IL 60008 > USA > > Phone: (847)-437-8090 x334 > Fax: (847)-437-8144 > e-mail: michael.pedersen@knowlesinc.com > > >