Hi all,

I need some suggestions for the following fabrication objective:

Using AZ 9260 positive resist, I would like to achieve thickness for ~ 20 um
and the smallest feature size is 10um.

I am facing some problems in the soft bake, exposure dose and development of
the patterns.

I would be obliged if I can get some recipe that I could use as a reference.

Thanking you in anticipation,

Anirban