Hi Li,

I work with samples that have similar dimensions.  I typically do a
USB clean on my samples in acetone and methanol before I do any
fabrication on them.  Put acetone in a small beaker and submerge your
samples in the acetone.  Put water in the bath container and then
place the small beaker of acetone in the water.  (Make sure there
isn't too much water or the beaker may float around and possible tip
over.) Then I repeat the process with methanol.  Do not pour the
acetone and methanol directly into the bath container.

Hope this helps.

Tony

On Tue, Mar 9, 2010 at 10:07 AM, Li. Zhang  wrote:
> Hi, all,
>
> I diced a 4-in silicon wafer into 15mm*15mm pieces. I usually use cotton
> tips soaked with acetone to clean the small wafer pieces.
> However, it is very time consuming when I deal with a large amount of
> pieces. Also, I find the surface could not be cleaned thoroughly sometimes.
> There are still some residue and tiny particles staying on the surface.
>
> Do you have any suggestion on how I am supposed to improve the cleaned surface
> quality in an efficient way?
>
> Very appreciative!
>
> Li


--
Tony Price
Department of Electrical Engineering
University of South Florida
4202 E. Fowler Avenue, ENB-118,
Tampa, FL, 33620
Office: ENB 412
Phone: (813) 974-4851
Cell: (404) 291-3506