Hi, Another efficent method is to use Piranha ( H2O2+HESO4 1/1) put the H2O2 before the acid in the beaker and mix for 1 min, then put your wafer and wait for 2 mn and you will have very good results. Alaa Tony Price a écrit : > Hi Li, > > I work with samples that have similar dimensions. I typically do a > USB clean on my samples in acetone and methanol before I do any > fabrication on them. Put acetone in a small beaker and submerge your > samples in the acetone. Put water in the bath container and then > place the small beaker of acetone in the water. (Make sure there > isn't too much water or the beaker may float around and possible tip > over.) Then I repeat the process with methanol. Do not pour the > acetone and methanol directly into the bath container. > > Hope this helps. > > Tony -- Alaa el dine ALLOUCH Doctorant au LAAS-CNRS-Groupe N2IS 7 Av colonel Roche, 31077 Toulouse Tél : 05 61 33 78 71