Diep, I think the Au layer should be needed since it is a very solderable surface while the Pt tends to be oxidized leading the solderability issues. Thank you and best regards, JTD -----Original Message----- From: mems-talk-bounces+jdangtran=s3cinc.com@memsnet.org [mailto:mems-talk-bounces+jdangtran=s3cinc.com@memsnet.org] On Behalf Of Buu Diep Sent: Wednesday, March 10, 2010 6:28 PM To: mems-talk@memsnet.org Subject: [mems-talk] Pt as oxidation protection Hello, Has anyone successfully tried Ti/Pt base metal for AuSn20 bonding instead of the Ti/Pt/Au stack? Regards, Buu Diep