durusmail: mems-talk: Ni-Fe etchant
Ni-Fe etchant
2010-03-17
2010-03-17
2010-03-18
Ni-Fe etchant
Xiaoguang Liu
2010-03-18
Hi Greg

May I know what type of copper etchant you are using?

Best
Leo

On Wed, Mar 17, 2010 at 6:48 PM, Greg Ostrowicki
 wrote:
> In my experience etching copper, which can also suffer from severe undercut,
> diluting the etchant significantly along with mild agitation reduced
> undercuts from ~10x to ~3x.
>
> Regards,
> Greg Ostrowicki

--
Xiaoguang "Leo" Liu
Electrical and Computer Engineering
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu
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