prateekgarg:

    Maybe you should make a comparision between the silicon oxide contact and
the pit under the microheater, as there still a big heat loss if not in vacuum.

    For a pit under the microheater, you can etch a through hole from back side
using DRIE or TMAH etc.

Ren Sen

Northwestern Polytechnical University,
Xi'an, China


From: prateekgarg07@gmail.com
To: MEMS-talk@memsnet.org
Date: Mon, 22 Mar 2010 00:30:29 +0530
Subject: [mems-talk] pit under microheater


hi all,

i want to make a pit under microheater (of dimensionn 200x200 micrometer).
at the bottom there is silicon layer of 500 micron. above silicon layer
there is silicon oxide layer of 10micron.
above silicon oxide there is microheater.
i want to make pit under silicon oxide so that there will be no heat loss
due to conduction.

thank you