durusmail: mems-talk: pit under microheater
pit under microheater
2010-03-21
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pit under microheater
prateek garg
2010-03-23
hi,

Thanks for the reply, but if i back etch then that affects strength of
the microheater... so please suggest something for the front side etching.
Should i use isotropic etching or anisotropic etching for front side etching?

thanks
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