Hi Prakeek,

You can place your heater on a very thick oxide layer: You make your Si-
substrate porous by anodic etching, then oxidize the porous layer, and deposit
the heater layer on it. This would be a good compromise between the thermal
isolation and the mechanical stability.

Cheers

Natsuki



-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces+natsuki.miyakawa=eads.net@memsnet.org [mailto:mems-talk-
bounces+natsuki.miyakawa=eads.net@memsnet.org] Im Auftrag von prateek garg
Gesendet: Sonntag, 21. März 2010 20:00
An: MEMS-talk@memsnet.org
Betreff: [mems-talk] pit under microheater

hi all,

i want to make a pit under microheater (of dimensionn 200x200 micrometer).
at the bottom there is silicon layer of 500 micron. above silicon layer
there is silicon oxide layer of 10micron.
above silicon oxide there is microheater.
i want to make pit under silicon oxide so that there will be no heat loss
due to conduction.

thank you