Just to re-visit a wise warning from a recent poster, Piranha etch (at 110C or not) is seriously hazardous, and we need to be flagging up safety advice when suggesting stuff. I don't see a problem with using an oxygen asher, and if there is no problem (anyone?), do that instead, Mikas! Andy Le Cao Hoai Nam wrote: > Hi Mikas, > > You can easily clean the mask with hot Piranha bath (110C) for 15 min. > You should use a big quartz beaker and put the soda-lime glass side of > the mask downward to the quartz beaker and the Cr side of the mask > upward. I don't know how robust is your mask so you should test first > by dipping a small corner of the mask to the Piranha bath. I cleaned > our masks (Cr in soda-lime glass) several times with Piranha bath and > there was no problem. > > Greetings, > > Nam > Dublin City University