durusmail: mems-talk: Cleaning optical masks
Cleaning optical masks
Cleaning optical masks
Andrew Irvine
2010-03-26
Just to re-visit a wise warning from a recent poster, Piranha etch (at
110C or not) is seriously hazardous, and we need to be flagging up
safety advice when suggesting stuff.

I don't see a problem with using an oxygen asher, and if there is no
problem (anyone?), do that instead, Mikas!

Andy

Le Cao Hoai Nam wrote:
> Hi Mikas,
>
> You can easily clean the mask with hot Piranha bath (110C) for 15 min.
> You should use a big quartz beaker and put the soda-lime glass side of
> the mask downward to the quartz beaker and the Cr side of the mask
> upward. I don't know how robust is your mask so you should test first
> by dipping a small corner of the mask to the Piranha bath. I cleaned
> our masks (Cr in soda-lime glass) several times with Piranha bath and
> there was no problem.
>
> Greetings,
>
> Nam
> Dublin City University
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