I agree with Andy about the safety issue when dealing with Piranha. I
should have mentioned that in the previous post. I just want to give
Mikas an option from my experience. If you could clean your mask with
oxygen asher then that a better option than Piranha.

If not then you could think about using Piranha. I still think Piranha
is quite popular and acceptable for cleaning in MEMS process if you
handle it properly. Following are some safety guides for handling with
Piranha.

http://www.mne.umd.edu/LAMP/Sop/Piranha_SOP.htm
http://www.stanford.edu/dept/EHS/prod/researchlab/lab/safety_sheets/08-111.pdf

Greetings,

Nam
Dublin City University



On Fri, Mar 26, 2010 at 2:04 PM, Andrew Irvine  wrote:
> Just to re-visit a wise warning from a recent poster, Piranha etch (at 110C
> or not) is seriously hazardous, and we need to be flagging up safety advice
> when suggesting stuff.
>
> I don't see a problem with using an oxygen asher, and if there is no problem
> (anyone?), do that instead, Mikas!
>
> Andy