durusmail: mems-talk: Gold etchant for PDMS substrates
Gold etchant for PDMS substrates
2010-04-05
Gold etchant for PDMS substrates
nidhi maheshwari
2010-04-04
Dear All,

I have to pattern gold onto PDMS for electrodes fabrication. My device
requirements are such that I can not perform a lift-off. I have tried
etching gold (KI+I2+water) at room temperature. After etching, the
PDMS substrates take a reddish hue. These substrates do not bond to
any other material nor a subsequent layer of PDMS onto it gets cured.
Can anyone please suggest some alternative etchant or some method by
which I can cure subsequent PDMS (have already tried curing it at high
temperature for longer durations). Is there some well defined
chemistry between PDMS and gold etchant which I am missing here?

Thanks
Nidhi
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