Have you tried bonding with oxygen plasma?

So you are sputtering gold onto your device then adding resist, then
exposing, then etching?


On Sun, Apr 4, 2010 at 9:02 AM, nidhi maheshwari  wrote:
> Dear All,
>
> I have to pattern gold onto PDMS for electrodes fabrication. My device
> requirements are such that I can not perform a lift-off. I have tried
> etching gold (KI+I2+water) at room temperature. After etching, the
> PDMS substrates take a reddish hue. These substrates do not bond to
> any other material nor a subsequent layer of PDMS onto it gets cured.
> Can anyone please suggest some alternative etchant or some method by
> which I can cure subsequent PDMS (have already tried curing it at high
> temperature for longer durations). Is there some well defined
> chemistry between PDMS and gold etchant which I am missing here?
>
> Thanks
> Nidhi
>

--
Nathan McCorkle
Rochester Institute of Technology
College of Science, Biotechnology/Bioinformatics