Hi Xiaoyong,

To remove the top layer of ProTEK B3 you can use just O2 or ProTEK remover
100. The final primer layer you will need to use O2/CF4, 2:1. Also it is
important that you have a cooling chuck in the plasma tool. As if the wafer
gets too hot then the ProTEK will struggle to come off.

It does not need to be CF4, any fluorine gas should work!
Hope it helps
Thanks
Matt