Well I am not a chemist, but the typical oxidation states (valence) of Ti are 2, 3, & 4 http://chemistry.about.com/library/weekly/aa122002a.htm and the most common valence for Oxygen is -2. So to form a compound with a net charge of zero (unlike a radical) TiO Ti204 Ti2O3 ; are all potential stoichiometric compounds with varying degrees of likelihood of formation and stability. Whereas Ti205 Would seem to not be a stoichiometric compound, but would have a net charge of -2 (most likely), -4, or -6 if it forms at all. For a discussion of other titanium oxides try locating this European patent abstract (Note Ti305): Let's hear from the chemists out there, since I have exhausted my High School chemistry knowledge. BTW Why are you asking? Best Regards, Wendell McCulley -----Original Message----- From: mems-talk-bounces+wmcculley=earthlink.net@memsnet.org [mailto:mems-talk-bounces+wmcculley=earthlink.net@memsnet.org] On Behalf Of amron gary Sent: Monday, April 19, 2010 6:13 PM To: mems-talk@memsnet.org Subject: [mems-talk] Is Ti2O3 stoichiometric? Hi MEMS community members, Is Ti2O3 stoichiometric? How about Ti2O4 and Ti2O5? I would really appreciate if someone can explain this to me. Any article or notes will be good as well. Thanks, -Imran