Dear Yu Chen,

In my opinion, from technology point of view, every CMOS technology has its own
design rules, modules and process procedure.

Compatible then means that you have to respect all those rules and process
procedures.

Regards
Rabah

> Date: Wed, 12 May 2010 13:55:05 +0800
> From: cyyfq0808@gmail.com
> To: mems-talk@memsnet.org
> Subject: [mems-talk] what CMOS compatible means exactly
>
> I am wondering what CMOS compatible means exactly.
>
> Probably it includes:
>
> Materials: some materials are not allowed
>
> Process: some processes are not preferred like liftoff
>
> Temperature:
>
> …
>
> Any comments are welcome.
>
> Thanks
>
> Yu CHEN