Plasma bonding works.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-
talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Miyakawa,
Natsuki
Sent: Tuesday, May 18, 2010 11:43 AM
To: General MEMS discussion
Subject: [mems-talk] SiO2-Glass anodic bonding

Dear all,

Is it possible to bond thermally oxidized Si-Wafer (wafer back side is free of
oxide) with glass-wafer anodically? If yes, with which parameter? I tried 500°C
/ 600V (which work well for Si-glass anodic bonding), but it didn't work.

Thank you!

Natsuki