Hi,

Use an ion barrier such as Si3N4 to trap the Na+ ions, then a glass to Si3N4
interface at 400 C should bond.

Best regards,

Julian.


----- Original Message -----
From: "A.ALLOUCH" 
To: "General MEMS discussion" 
Sent: Tuesday, May 18, 2010 4:06 PM
Subject: [mems-talk] pyrex/pyrex anodic bonding


Hi,

I am trying to bond a pyrex wafer to another 4 inch pyrex wafer by
anodic bonding.  For that I use an amorphous silicon deposited by PECVD
as intermediate layer (less than 1 µm thickness) or polysilicon deposited
by LPCVD.  The parameters which I use are: 450°C on both wafers, 1200 V
and 200N, but in both case I don't have a good bonding. if you have any
suggestions, they will be welcome.

best,

Alaa