Suprem.

Suprem will not give you DRIE per say but etching in general. I dont know if
there is a specific simulation tool to deal with DRIE exclusive to etching in
general.

My experience is that SUPREM works just fine for simulating etching mems
materials.

regards,
Nimo


--- On Mon, 6/7/10, yasser sabry  wrote:

From: yasser sabry 
Subject: [mems-talk] DRIE Simulator
To: "General MEMS discussion" 
Date: Monday, June 7, 2010, 10:50 AM

Dear All,

I'm looking for a good DRIE simulator.

I'll be grateful if you give me your experience with different simulators..

Thanks in advance,
Yasser Sabry